Modular surface mount fluid system

ABSTRACT

A bridge fitting for use with two or more surface mounted components includes a housing having at least a first port disposed on a first side of the housing, at least a second port non-coaxial with the first port and disposed on a second side of the housing opposite the first side of the housing, and an internal fluid passageway connecting the first and second ports. The internal fluid passageway is configured to limit fluid flow within the bridge fitting to a single path between the first and second ports.

PRIORITY CLAIM

This application is a continuation of U.S. application Ser. No.11/881,595, filed Jul. 27, 2007 entitled Modular Surface Mount FluidSystem, which is a divisional of U.S. application Ser. No. 10/721,312,filed on Nov. 25, 2003 entitled Modular Surface Mount Fluid System whichclaims the benefit of U.S. provisional application Ser. No. 60/429,088,filed on Nov. 26, 2002 entitled Modular Surface Mount Manifold Systemand U.S. provisional application Ser. No. 60/433,371, filed on Dec. 13,2002 entitled Modular Surface Mount Fluid System. The entire disclosuresof the aforementioned patent applications are all fully incorporated byreference herein.

FIELD OF THE INVENTION

The inventions disclosed herein relates in general to manifolds andvalves for fluid systems.

BACKGROUND OF THE INVENTION

Various industrial manufacturing processes often require the use ofgasses and fluids which are controlled by systems made up of valves,regulators, pressure transducers, mass flow controllers and the like.These components are typically connected together by the use of weldedtubing and compression fittings and mounted on a vertical panel. Thesetype of connections may be undesirable in some applications because theyadd additional time and cost for welding operations, unnecessary spacebetween components and make it difficult to replace a component locatedbetween other components. Further, these systems are typically customdesigned and manufactured which make the manufacturing costs andprocurement of replacement parts quite expensive.

New modular fluid systems have been recently introduced into thesemiconductor industry in order to overcome these type of problems.Typical components of these systems such as valves, pressure regulatorsand other typical fluid components have been reconfigured so that theirinlet and outlet ports are co-located in a coplanar configuration.Further, the attachment flow component flange has a standard size andshape in order to permit interchangeability of surface mount components.However, these fluid systems have the disadvantage of being veryexpensive because they are machined from high purity metal stock. Thesesystems further require the use of metal seals, which are veryexpensive. Thus it is desired to provide an inexpensive modular manifoldsystem for use for example, in the analytical process industry.

Other features and advantages of the invention will become apparent fromthe following detailed description, with reference to the accompanyingdrawing and claims, which form a part of the specification.

SUMMARY OF THE INVENTION

In an inventive aspect of the present application, a bridge fitting maybe configured to communicate fluid in a modular fluid system from a flowcomponent in a first layer or substrate layer to a flow component in asecond layer or manifold layer. In one embodiment, a bridge fitting foruse with two or more surface mounted components includes a housinghaving at least a first port disposed on a first side of the housing, atleast a second port non-coaxial with the first port and disposed on asecond side of the housing opposite the first side of the housing, andan internal fluid passageway connecting the first and second ports. Theinternal fluid passageway is configured to limit fluid flow within thebridge fitting to a single path between the first and second ports.

In another inventive aspect of the present application, a bridge fittingconfigured to communicate fluid in a modular fluid system from a firstlayer to a second layer may include recessed cavities for receiving sealcomponents, such as, for example, gaskets or O-rings. In one embodiment,a bridge fitting for use with two or more surface mounted componentsincludes a housing having a first port disposed on a first planarsurface of the housing, a second port disposed on a second planarsurface of the housing opposite the first planar surface of the housing,and an internal fluid passageway connecting said first and second ports.Each of the first and second ports includes a sealing surface recessedfrom the corresponding one of the first and second planar surfaces.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a perspective exploded view of the modular fluid system of thepresent invention;

FIG. 2 is a cross-sectional view in the direction 2-2 of the fluidsystem of FIG. 1;

FIG. 2 a is a partial, perspective view of an end connector and manifoldblock;

FIG. 2 b is a partial, exploded view of an alternate embodiment of anend connector and manifold block;

FIG. 3 is a cross-sectional view of an alternate embodiment of anoffset-center bridge fitting;

FIGS. 4A and 4B are cross-sectional views of an alternate embodiment ofa center-center bridge fitting;

FIG. 5A is a cross-sectional view of alternate embodiments of a manifoldbridge fitting;

FIGS. 5B, 6 are top and partial views of additional embodiments of abridge fitting;

FIG. 7 is a side, cross-sectional view of the bridge fitting of FIG. 6;

FIG. 8 is a top, partial view of an alternate embodiment of a bridgefitting;

FIG. 9 is a side, cross-sectional view of the bridge fitting of FIG. 8;

FIG. 10 is a top, partial view of an alternate embodiment of a bridgefitting;

FIG. 11 is a side, cross-sectional view of the bridge fitting of FIG.10;

FIGS. 12A and 12B are cross-sectional views of a top ported normallyclosed valve of the present invention shown in the closed and openpositions, respectively;

FIGS. 13A and 13B are cross-sectional views of a top ported normallyopen valve of the present invention shown in the closed and openpositions, respectively;

FIG. 14 is a cross-sectional view of a check valve of the presentinvention shown in the closed position;

FIG. 15 is a perspective exploded view of the poppet of the valve ofFIG. 14;

FIG. 16A is a perspective exploded view of a connector mounting blockshown together with two channel blocks; and

FIG. 16B is a cross-sectional view of an assembled connector mountingblock and channel block system of FIG. 16A.

DETAILED DESCRIPTION

The present invention is directed to a modular surface mount fluidsystem and surface mount modular flow valves for use therewith. Themodular surface mount fluid system is described in detail in Section I,while the surface mount modular flow valves are described in more detailin sections II and III.

Modular Surface Mount Fluid System

Referring now to FIG. 1, an exploded view of an exemplary modular fluidsystem 10 is shown for use with surface mount fluid components such asvalve 12 and filter 14. Other fluid components such as pressuretransducers (not shown), mass flow controllers (not shown) and the likemay also be utilized in conjunction with the modular manifold system ofthe invention. As shown in FIGS. 1 and 2, the surface mount components12, 14, 16 each have a square mounting flange 15 of a standard size withat least one inlet port and at least one outlet port located adjacentthe inlet port. The inlet/outlet ports are located on the bottom planarmounting surface 17 of the mounting flange 15. For two port componentssuch as filter 14 and generic two-port valve 16, an inlet port 20 islocated at the center of the bottom planar mating surface 17 of themounting flange, and an offset outlet port 22 is located adjacent theinlet port 20. For the generic three-port valve 12, the inlet port 24 isoffset from the center, and further comprises a center oriented inlet(or outlet) port 26 and an offset outlet port 28. Note that all of theinlet/outlet ports are coplanar.

As shown in FIGS. 1 and 2, the substrate or first layer of the fluidsystem 10 comprises one or more substrate channel blocks 30. Thesubstrate channel blocks 30 may be sized to receive one or more surfacemount flow components. Preferably, the substrate channel block 30receives a plurality of surface mount flow components. The substratechannel block 30 comprises an upper planar mounting surface 32 forreceiving and securing the surface mount components thereon, and achannel or groove 34 oriented along the longitudinal axis of the channelblock for receiving two or more bridge fittings. A series of threadedfasteners (not shown) may be inserted through holes 35 in the basemounting flanges of the fluid components in order to secure thecomponents to aligned threaded holes 36 of the substrate channel block30. The groove or channel 34 preferably has parallel side walls 38 and abottom wall 40 perpendicularly oriented to each of the side walls.

The modular fluid system 10 of the present invention further includesone or more bridge fittings which are received in the channel 34 of thesubstrate channel block 30. The bridge fittings 50, 80, 110, 130, 140,150, 160 as shown in FIGS. 1 through 5, function to “bridge the flow”,i.e., provide fluid communication from one flow component to otheradjacent flow component(s). The bridge fittings may also provide fluidcommunication from a flow component in a first substrate layer to a flowcomponent in a second substrate layer. The external shape of the bridgefittings further provide for a locating feature to prevent mis-assemblyas well as a clip or retaining feature in order to retain the bridgefittings within the channel blocks when mounted in a verticalorientation. All of these features will be described in more detail,below.

As shown in FIG. 2, a first type of bridge fitting 50 referred to as an“offset-center” bridge fitting communicates fluid flow between an“offset” oriented port 28 of a first flow component 12 and a “center”located port 20 of a second, adjacent flow component 16. For the vastmajority of two port fluid components, the offset oriented port 22 istypically the outlet, and the center oriented port 20 is typically theinlet. The offset-center bridge fitting 50 includes a housing 52 havinga first or “offset” port 54 and a second or “center” port 56 located onthe upper surface of the housing. The offset port 54 of the bridgefitting is positioned for fluid communication with the offset port 28 ofa first fluid flow component 12, while the center port 56 of the bridgefitting is positioned for fluid communication with the center port 20 ofa second, adjacent fluid flow component 16. As shown in FIG. 2, when thebridge fitting 50 is received within the channel of the substrate block30, the first and second ports 54, 56 are flush with respect to thesubstrate channel mounting surface 32. The first and second portspreferably comprise a circular recessed cavity or counterbore about theport hole opening for receiving a gasket or O-ring seal 57. The sealsmay be made of any suitable material such as elastomer, plastic, rubberor polymer material. Other seal technologies which may used inconjunction with the invention will be readily apparent to those ofordinarily skill in the art.

The first and second ports 54, 56 of the bridge fitting are eachconnected to elbow shaped internal fluid passageways 58 a, 58 b.Extending from the elbow shaped internal fluid passageways 58 a, 58 bare optional straight flow passageways 60 a, 60 b which are joinedtogether. Thus the elbow shaped internal fluid passageways 58 a, 58 band the straight flow passageways 60 a, 60 b cooperate to form aU-shaped internal fluid passageway.

In order to ensure the proper location of the center port of the bridgefitting 50 with the center oriented orifice 20 of the flow component 16as well as a manifold bridge fitting in a second layer, an enlarged boss64 extends from the bottom surface 62 opposite the center port 56 of theoffset-center bridge fitting 50. The enlarged boss 64 is aligned forreception in a drop down hole 66 located in the bottom wall 40 of thechannel block 30, thereby providing alignment of the center port 56 ofthe bridge fitting 50 with the center port 20 of the surface mountcomponent 16 and potentially a port of a bridge fitting located in asecond or manifold layer (not shown). The depth and diameter of the boss64 is sized to retain the bridge fitting within the channel when thechannel block 30 is rotated into a vertical orientation. When thechannel block 30 is in a vertical orientation, the sidewall of the bossinterferes with the sidewall of the hole 66 in such a manner so as toretain the bridge fitting within the channel. Further, the diameter ofthe boss 64 is sized to be only slightly smaller than the hole 66, inorder to further aid in the retention of the boss within the hole 66.Boss 64 may further comprise a blind recessed area 67 for insertion of agasket so that the boss end can function as a cap to seal off flow of amating port 112 of a manifold bridge fitting located in a manifoldlayer, as described below.

The offset center bridge fitting 50 may further comprise a second boss70 extending from the bottom surface opposite the offset port 54. Thesecond boss 70 is preferably a different size than the first boss 64,and is received in a complementary shaped blind hole 72 in alignmentwith the offset port location 28 of the surface mount component 12. Whenthe second boss 70 has a different size or shape than the first boss 64,the bosses 64, 70 will only fit in their respective holes 66, 72. Asshown in the cutaway portion of the channel block 30, the channel blockhas a series of holes in a repeating pattern: counter bore 72, throughhole 66, counter bore 72. The counter bore holes 72 align with theoffset valve ports 22, while the through holes 66 align with the centervalve ports 20. Thus the placement and size of the channel block holestogether with the different sized (or shape) bosses align the respectiveoffset, center ports of the bridge fitting and valves, therebypreventing the mis-assembly or improper location of the bridge fittingswithin the channel block.

Thus the first and second bosses 64, 70 function to provide alignment ofthe offset port 54, and the center port 56 of the bridge fitting 50 withthe corresponding offset port 28, and center port 20 of the surfacemount components 12, 16, respectively. The first and second bosses 64,70 further function to retain the bridge fitting 50 within the channelwhen the channel block is held vertically, eliminating the need forseparate retaining clips.

A second embodiment of the bridge fitting 80 is also shown in FIGS. 1and 2 and is referred to as an “offset-offset” bridge fitting. Theoffset-offset bridge fitting communicates fluid flow between an “offset”oriented port 22 of a first flow component 14 and an “offset” locatedport 24 of a second, adjacent flow component 12. Unless if indicatedbelow, the offset-offset bridge fitting 80 has the same features as theoffset-center bridge fitting 50 described above. The offset-offsetbridge fitting 80 includes a housing 52 having a first offset port 82and a second offset port 84 located on the upper surface of the housing.The first offset port 82 of the bridge fitting 80 is positioned forfluid communication with the offset port 22 of a first fluid flowcomponent 14, while the second offset port 84 of the bridge fitting ispositioned for fluid communication with the offset port 24 of a second,adjacent fluid flow component 12.

In order to ensure the proper location of the offset-offset bridgefitting 80 within the channel 34 of the substrate channel block toprevent mis-assembly, a first and second boss 70 extend from the bottomsurface 62 opposite each offset port 82, 84 of the offset-offset bridgefitting 80. The bosses 70 are aligned for reception incomplementary-shaped blind holes 72, which are in alignment with theoffset port locations 22, 24 of the surface mount components 12, 14.Thus as described above, the bosses 70 function to retain the bridgefitting 80 within the channel when the channel block is held vertically,as well as align the bridge fitting ports with the offset ports of thesurface mount components.

The modular manifold system 10 may further optionally comprise a secondlayer comprised of one or more manifold channel blocks 90 of varyinglengths and one or more bridge fittings. The manifold channel blocks 90have an upper mounting surface 92 for securing to the lower surface ofthe substrate channel blocks 30 via fasteners (not shown) which arepositioned within holes of the upper channel blocks (not shown) and intoaligned holes 94 of the lower channel blocks 90. This allows the channelblocks 90 to be disconnected from the upper substrate layer and slid outfrom below, allowing for easier accessibility. As shown in FIG. 1, themanifold channel blocks 90 are generally oriented in a directionperpendicular to the longitudinal axis of the substrate layer.

The manifold channel block 90 further comprises a channel or groove 96for the reception of one or more manifold bridge fittings 110. Thegroove or channel 96 preferably has parallel side walls 98 and a bottomwall 100 perpendicularly oriented to each of the side walls. Themanifold bridge fittings 110 are essentially identical to the bridgefitting 50 except for the following features. The manifold bridgefitting 110 has a first port 112 and a second port 114 and a bossextending about each of said ports 112, 114, which are aligned forreception into drop down holes 66 located in the upper channel block 30of the first substrate layer. The manifold bridge fitting 110 furtheroptionally comprises one or more mounting pins 118 extending from thelower surface 62 which are aligned for reception into blind holes 120located in the bottom wall 100 of the channel block 90. The blind holestogether with the mounting pins function to properly align the manifoldbridge fitting ports 112, 114 with a port 132 of a drop down bridgefitting 130, and to retain the bridge fitting within the manifoldchannel block.

The drop down bridge fitting 130 has a first port 132 and a second port134 opposite the first port, with each of the ports connected togetherwith a straight through flow path 136. Each of the first and secondports 132, 134 further comprise a recessed area or counterbore forreceiving a gasket 57 therein. The drop down bridge fitting functions tocommunicate fluid between a center port 26 of a surface mount flowcomponent 12 in the upper substrate layer to a port 112 of a manifoldbridge fitting in the lower manifold layer. For example, purge gas maybe routed up from the manifold bridge fitting to the three port valve.Alternatively, flow may be directed from the first layer to the secondlayer depending upon the valve setting.

A second embodiment of a center-offset bridge fitting 140 is shown inFIG. 3, and which may be used in place of the center-offset bridgefitting 50. The center-offset bridge fitting 140 is the same as bridgefitting 50, except that the left-hand side of the fitting (the elbowfitting) has been modified into a T fitting 141 having a first port 142and a second port 144 directly opposite the first port. Thus, if thecenter-offset bridge fitting 140 were substituted for the center-offsetbridge fitting 50 in FIG. 2, fluid may communicate between adjacentfluid components 12, 16 and between the upper substrate layer and thelower substrate layer.

FIG. 4A illustrates yet another embodiment of a bridge fitting denotedas a “center-center” bridge fitting 150 because each port 152, 154 isaligned for mating with a center port of a surface mount component.Opposite each port 152, 154 are center port alignment bosses 64. Theleft hand side of the fitting has a T fitting 156 having a first port152 and a second port 158 directly opposite the first port. Thus thecenter-center bridge fitting 150 communicates fluid between the centerport of a surface mount component, the center port of a second, adjacentfluid component and the port of a manifold bridge fitting located in themanifold layer. FIG. 4B also illustrates a center-center bridge fitting153, however the left hand side of the fitting has an elbow 155 insteadof a T fitting. Thus bridge fitting 153 communicates fluid from thesubstrate layer to the manifold layer.

FIG. 5A illustrates an alternate embodiment of a manifold bridge fitting160. The manifold bridge fitting 160 comprises an elbow fitting 162connected to a Tee fitting 164 which is connected to an elbow fitting166. The manifold bridge fitting comprises three ports aligned for fluidcommunication with a port of a bridge fitting located in the uppersubstrate layer such as a port 134 of a drop down fitting 130, or ablind port 67 of a center offset fitting.

FIG. 5B illustrates one end of an alternate embodiment of a bridgefitting 167. The bridge fitting 167 comprises a first projection 168which extends from the sidewall of the housing. The first projection isshaped as a half-circle. The bridge fitting 167 may also comprise asecond projection 169 which extends from the sidewall of the housing,which may also be shaped as a half-circle. The first and secondprojections 168, 169 may also comprise any desired shape. The channelblock sidewall 38 further comprises slots sized to receive either thefirst projection, the second projection, or both (not shown). The slotsare located in the appropriate location to align the ports of the bridgefittings with the appropriate port of the surface mount component. Theprojections together with the slots function to prevent mis-assembly ofthe system as well as retain the bridge fitting within the channel whenmounted in a vertical orientation.

FIG. 6 illustrates a close up top view of a port of a bridge fitting. Inorder to retain a standard O-ring within the counterbore when the bridgefitting is inverted, the diameter of the counterbore may be slightlysmaller than the diameter of the O-ring. For example, if a diameter ofthe O-ring is 0.260, the diameter of the counterbore would be about0.244. Another option is shown in FIG. 9, where the counterbore has anangle θ in the range of about 60 to about 70 degrees. For example, if adiameter of the O-ring is 0.260, the diameter of the counterbore wouldbe about 0.244. Thus the counterbore diameter may be smaller than thestandard O-ring yet allow room for the gasket to flow duringcompression. As shown in FIG. 10, the counterbore has flat sidewallsspaced apart a distance 1 which is less than the diameter of the gasket.For example, for a standard 006 gasket having an approximate 0.260diameter, the counterbore diameter could be 0.280 while distance 1 is0.244. Thus the flat sidewalls squeeze the gasket and retain it when thebridge fitting is inverted, while the non-flat portion of thecounterbore allows the gasket to flow therein when the gasket is undercompression.

As shown in FIGS. 1-5, the above described bridge and manifold fittingsmay be machined from two or more separate components and then welded orotherwise joined together. Alternatively, the bridge fitting may beintegrally formed using metal injection molding or other techniquesknown to those skilled in the art. It is preferred that the abovedescribed bridge and manifold fittings be comprised of stainless steelsuch as 316 and the channel blocks 30, 90 be comprised of aluminum,although any suitable material such as aluminum, plastic or metal wouldwork for the invention components.

FIGS. 16A and 16B illustrate a connector block 171 which may be used forjoining two channel blocks 30 together while maintaining the spacing ofthe surface mount components. The connector block has a plurality ofthreaded holes 173 for receiving fasteners for connecting the respectiveend of a channel block 30 to the connector block 171. The connectorblock 171 further comprises counterbores 175 which receive fasteners formounting the connector block upon a base plate (not shown).

As shown in the FIGS. 2, 2A and 2B, the modular system 10 may alsocomprise end fittings 170, which comprise an elbow fitting 172 having a90 degree internal passageway connected to a standard tube fitting 174or other suitable fitting for connecting with a fluid line. The endfitting may be utilized as an inlet fitting or an outlet fitting whichmates with the fluid line (not shown). Thus, the outlet or inlet end ofthe elbow fitting is connected to the respective inlet or outlet end ofa fluid component. FIGS. 2A and 2 b further illustrate details of theend fittings and manifold blocks designed to prevent torque from beingtransmitted to the end fittings 170 when the manifold system isassembled. As shown in FIG. 2A, two rectangular plates 176 are weldedonto the channel block forming a slot for receiving the aligned flats178 of a hexagonal nut, thereby preventing the nut from rotation.Alternatively, the slot may be integrally formed in the channel block.As shown in FIG. 2B, the end fitting preferably has a boss 180 locatedbehind the hex nut. The boss 180 has flats 182 located on the top andbottom or a square cross section so that rotation of the boss isprevented when the end fitting is inserted in the channel. The boss mayfurther be secured in the channel via lock down bar 183.

Modular Flow Control Valve

A normally closed modular flow control valve 200 of the presentinvention is best shown in FIGS. 12A and 12B. The valve 200 comprises abody 220 having a flanged lower end 222 with one or more holes 224 formounting the valve 200 to a manifold block or substrate via mountingbolts (not shown), and an upper end for receiving a cap 250. Preferably,the flanged lower end 220 is generally square in shape and hasdimensions on the order of about 2 inches by 2 inches. The body 220further comprises an inlet fluid passageway 260, an outlet fluidpassageway 280, and a vent fluid passageway 300. The body 220 furthercomprises an internal cavity 320 having a first narrow portion 320 awhich is in fluid communication with the inlet passageway 260, theoutlet passageway 280 and the vent passageway 300.

A T-shaped stem 340 is axially disposed within the cavity 320. The stem340 further comprises a lower stem portion 360 which is received in thefirst narrow portion of the cavity 320 a. The stem 340 further comprisesan actuator piston 400 formed by the enlargement of the width of thestem which is received in a second larger diameter portion 320 b of thecavity. The stem is biased into the closed position by the downwardforce of a spring 420. The spring 420 is housed in a groove 370 of theupper surface 380 of the piston 400 and an inner surface of the cap 250,and around a sleeve 425 of the cap 250. The upper T section 350 of thestem is mounted within the sleeve 425 of the cap.

The valve 200 is in the closed position when the stem 340 is at itsextreme lower position as shown in FIG. 12A. The valve is in the openposition when the stem is at its extreme upper position as shown in FIG.12B. When the valve is in the closed position, fluid communication fromthe fluid inlet passageway 260 is blocked by O-rings 500 seating againstthe cavity wall 330. When the valve is in the open position, the inletpassageway 260, the outlet passageway 280 and a first fluid compartment540 are all in fluid communication. The first fluid compartment 540 isformed by the annulus between the stem lower portion 360 and the innercavity wall 320 from the lower surface of the cavity 330 to the secondO-ring 430.

The internal actuator of the valve 200 comprises the piston 400 and anactuator fluid compartment 440. The actuator fluid compartment 440 isformed by the annulus between the stem 340 and the inner cavity wall 320from the third O-ring 460 to the fourth O-ring 480. The stem 340 furthercomprises an internal longitudinal bore 600 connected to a radialpassageway 620, so that fluid may communicate through the stem 340 andinto the actuator fluid compartment 440. When an external source ofpneumatic pressure is supplied through an internal bore 230 of the cap250 to the internal passageway 600, fluid is communicated to the radialpassageway 620 and to the actuator fluid compartment 440, resulting inpneumatic pressure being applied to the lower surface 640 of theactuator piston 400 so that the downward force of the spring 420 isovercome, lifting the stem to the open position. When the valve is inthe open position, fluid may communicate from the inlet passageway 260to the outlet passageway 280.

The valve body 200 further comprises a vent compartment 302 formed bythe annulus between the stem and the inner surface 320 a of the cavityfrom the second O-ring 430 to the third O-ring 460. A vent passageway300 provides fluid communication from the vent compartment and anenvironment external of the passageway.

A second embodiment of a modular surface mount valve having a normallyopen configuration is shown in FIGS. 13A and 13B. The valve 205 is thesame as valve 200 except for the following differences. The shape of thestem 340 has been changed slightly to resemble an upper case “T” asopposed to a lower case “t”, and further comprising a cavity along theupper surface of the T. The sleeve 425 of cap 250 has been eliminatedand the spring 420 has been relocated to between the lower wall 320 c ofthe cavity 320 and the lower surface 640 of the stem 340. Spring 420biases stem 340 into the normally open position. In order to actuate thevalve 205, an external source of pneumatic pressure is supplied throughthe internal bore 230 of the cap 250 to cavity 207 located upon theupper surface of the stem, resulting in pneumatic pressure being appliedto the upper surface of the actuator piston so that the force of thespring 420 is overcome, pushing the stem to the closed position as shownin FIG. 13A. When the pneumatic pressure supply is turned off, the valvereturns to its normally open position as shown in FIG. 13B, and fluidmay communicate from the inlet passageway 260 to the outlet passageway280.

Modular Surface Mount Check Valve

A second embodiment of a modular surface mount valve is shown in FIG.14. The check valve 700 includes a body 702 having a flanged lower end704 with mounting holes 706 for receiving fasteners (not shown) forsecuring the valve body to a modular surface mount manifold (not shown).The valve body 702 includes an axially oriented inlet passageway 710,and an offset outlet passageway 712. The valve body 702 further includesan inner axially oriented bore 720 which is in fluid communication withthe inlet passageway 710 and the outlet passageway 712 when the valve isin the open position, as described in more detail, below.

The valve body 702 further includes an upper mounting flange 708disposed about the opening of the inner bore 720 for receiving a maleend 730 of a cap 732. The male end of the cap and the inner bore wallare joined in a sealed relationship such as by suitable threads. AnO-ring or gasket 740 is preferably mounted in a groove 742 of the maleend of the cap for sealing engagement with the inner bore wall 720.

The valve body inner bore 720 has a transverse planar wall forming avalve seat 744. A valve chamber 750 is defined by the valve seat 744 andthe lower end portion of the male end of the cap 732. Mounted within thevalve chamber 750 for cooperation with the valve seat 744 is a poppet760. Poppet 760 is preferably a planar disk element. The poppet 760 isbiased into engagement with the valve seat 744 via spring 780 actingthrough a poppet stop 782. The poppet stop 782 includes an outer annularrim portion which has an outer diameter slightly less than the diameterof the bore. One end 784 of the coil spring 780 is mounted to the outerannular rim portion of the poppet stop 782 while the second end 786 ismounted within the bore of the cap. The poppet and poppet stop maycomprise the poppet and poppet stop embodiments described in U.S. Pat.No. 4,637,430, the entirety of which is hereby incorporated byreference.

The valve is moved from the closed position as shown in FIG. 14 to theopen position when the higher fluid pressure overcomes the force of thespring 780. The vertical travel of the poppet 760 is limited by theengagement of the poppet stop 782 with the male end 735 of the cap 732,thereby forming a stop.

The preferred form of the valves and manifold system of the inventionhas been shown and described above. However, with the present disclosurein mind it is believed that obvious alterations to the preferredembodiments, to achieve comparable features and advantages in otherassemblies, will become apparent to those of ordinary skill in the art.

1. A bridge fitting for use in a fluid manifold system for being influid communication with two or more surface mounted fluid components,the bridge fitting comprising: a housing comprising a first portdisposed at a first end portion of the housing, a second port disposedat the first end portion of the housing opposite the first port, and athird port disposed at a second end portion of the housing, with aninternal fluid passageway joining said first, second, and third portsand spacing the first, second, and third ports apart, and a locatingfeature extending from less than an entirety of a substantially planarsurface of the housing, wherein the locating feature is spaced apartfrom the first, second, and third ports.
 2. The bridge fitting of claim1, wherein the second port is coaxial with the first port.
 3. The bridgefitting of claim 1, wherein the third port is coplanar with the firstport.
 4. The bridge fitting of claim 1, wherein the locating featurecomprises a projection.
 5. The bridge fitting of claim 4, wherein theprojection is of a different size than the second port.
 6. The bridgefitting of claim 4, wherein the second port and the projection areconfigured to prevent incorrect orientation of the bridge fitting withinthe fluid manifold system.
 7. The bridge fitting of claim 1, wherein thelocating feature is disposed at the second end portion of the housing.8. The bridge fitting of claim 1, wherein the locating feature isdisposed opposite the third port.
 9. A modular fluid system forconnecting with two or more surface mount type fluid components, themodular system comprising: a bridge fitting, comprising a housing havinga first port disposed at a first end portion of the housing, a secondport disposed at the first end portion of the housing opposite the firstport, and a third port disposed at a second end portion of the housing,with an internal fluid passageway joining said first, second, and thirdports and spacing the first, second, and third ports apart, and a bridgefitting locating feature spaced apart from the first, second, and thirdports; and a block having a complementary shaped block locating featurefor engaging the bridge fitting locating feature, such that the block isconfigured to receive the bridge fitting in a desired location.
 10. Themodular fluid system of claim 9, wherein one of the bridge fittinglocating feature and the block locating feature comprises a projection,and the other of the bridge fitting locating feature and the blocklocating feature comprises a hole.
 11. The modular fluid system of claim9, wherein the bridge fitting locating feature comprises a projection,and the block locating feature comprises a hole.
 12. The modular fluidsystem of claim 11, wherein the hole in the block is sized to preventinsertion of the second port in the hole.
 13. The modular fluid systemof claim 9, wherein the block further comprises a groove for receivingthe bridge fitting therein, the block locating feature being disposed inthe groove.
 14. The modular fluid system of claim 9, wherein the bridgefitting and the block are configured to prevent incorrect orientation ofthe bridge fitting within the block.
 15. A bridge fitting for use in afluid manifold system for being in fluid communication with two or moresurface mounted fluid components, the bridge fitting comprising: ahousing comprising a first port disposed at a first end portion of thehousing and a second port disposed at the first end portion of thehousing opposite the first port, with an internal fluid passagewayjoining said first and second ports and spacing the first and secondports apart, and a projection extending from less than an entirety of asubstantially planar surface of a second end portion of the housing,wherein the projection is spaced apart from the first, and second ports.16. The bridge fitting of claim 15, wherein the second port is coaxialwith the first port.
 17. The bridge fitting of claim 15, wherein theprojection and the second port extend from a bottom side of the housing.18. The bridge fitting of claim 15, wherein the projection is of adifferent size than the second port.
 19. The bridge fitting of claim 15,wherein the second port and the projection are configured to preventincorrect orientation of the bridge fitting within the fluid manifoldsystem.
 20. The bridge fitting of claim 15, further comprising a thirdport disposed at the second end portion of the housing, the internalpassageway joining the first and second ports with the third port. 21.The bridge fitting of claim 20, wherein the projection is disposedopposite the third port.
 22. The bridge fitting of claim 20 wherein thethird port is coplanar with the first port.